MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01358cam a22002777a 4500 |
| CONTROL NUMBER |
|---|
| control field |
13308201 |
| DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20120625153803.0 |
| FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
030811s2004 nyua b 001 0 eng d |
| LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
2003276248 |
| NATIONAL BIBLIOGRAPHY NUMBER |
|---|
| National bibliography number |
GBA3-Y5182 |
| INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9788126532605 |
| DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
MAY |
| MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
May, Gary S |
| 9 (RLIN) |
4898 |
| TITLE STATEMENT |
|---|
| Title |
Fundamentals of semiconductor fabrication / |
| Statement of responsibility, etc |
by Gary S. May and Simon M. Sze |
| PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc |
New Delhi |
| Name of publisher, distributor, etc |
Wiley India |
| Date of publication, distribution, etc |
2011 |
| PHYSICAL DESCRIPTION |
|---|
| Extent |
xiii, 305 p. : |
| Other physical details |
ill. ; |
| Dimensions |
26 cm. |
| BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographical references and index. |
| FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
Contents: Ch.1. Introduction -- Ch.2. Crystal growth -- Ch.3. Silicon oxidation -- Ch.4. Photolithography -- Ch.5. Etching -- Ch.6. Diffusion -- Ch.7. Ion Implantation -- Ch.8. Film deposition -- Ch.9. Process integration -- Ch.10 IC manufacturing -- Ch.11. Future trends and challenges |
| SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Semiconductors |
| General subdivision |
Design and construction. |
| 9 (RLIN) |
4899 |
| SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Integrated circuits |
| General subdivision |
Design and construction. |
| 9 (RLIN) |
4900 |
| ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Sze, Simon M. |
| Dates associated with a name |
1936- |
| 9 (RLIN) |
4901 |
| ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Contributor biographical information |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/bios/wiley044/2003276248.html">http://www.loc.gov/catdir/bios/wiley044/2003276248.html</a> |
| ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Publisher description |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/description/wiley037/2003276248.html">http://www.loc.gov/catdir/description/wiley037/2003276248.html</a> |
| ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Table of contents |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/toc/wiley032/2003276248.html">http://www.loc.gov/catdir/toc/wiley032/2003276248.html</a> |
| ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
Dewey Decimal Classification |
| Item type |
Books |
