Handbook of deposition technologies for films and coatings : science, applications and technology / edited by Peter M. Martin.

Previous editions edited by Rointan F. Bunshah.

Includes bibliographical references and index.

Deposition technologies: an overview -- Plasmas in deposition processes -- Surface preparation for film and coating deposition processes -- Evaporation: processes, bulk microstructures, and mechanical properties -- Sputter deposition processes -- Lon plating -- Chemical vapor deposition -- Atomic layer deposition -- Plasma-enhanced chemical vapor depositionof functional coatings -- Unfiltered and filtered cathodic arc deposition -- Vacuum polymer deposition -- Thin film nucleation, growth and microstructural evolution: An atomic scale view -- Glancing angle deposition -- Nanocomposite coatings for severe applications -- Non-elemental characterization of film and coatings -- Characterization of thin films and coatings -- Atomspheric pressure plasma sources and processing -- Jet vapor deposition