TY  - BOOK
AU  - May,Gary S
AU  - Sze,Simon M.
TI  - Fundamentals of semiconductor fabrication
SN  - 9788126532605
U1  - 621.38152 
PY  - 2011///
CY  - New Delhi
PB  - Wiley India
KW  - Semiconductors
KW  - Design and construction
KW  - Integrated circuits
N1  - Includes bibliographical references and index; Contents: Ch.1. Introduction -- Ch.2. Crystal growth -- Ch.3. Silicon oxidation -- Ch.4. Photolithography -- Ch.5. Etching -- Ch.6. Diffusion -- Ch.7. Ion Implantation -- Ch.8. Film deposition -- Ch.9. Process integration -- Ch.10 IC manufacturing -- Ch.11. Future trends and challenges
UR  - http://www.loc.gov/catdir/bios/wiley044/2003276248.html
UR  - http://www.loc.gov/catdir/description/wiley037/2003276248.html
UR  - http://www.loc.gov/catdir/toc/wiley032/2003276248.html
ER  -