Scanning electron microscopy and x-ray microanalysis / Joseph I. Goldstein ... [et al.]. - 3rd ed. - New York : Springer c2003. - xix, 689 p. : ill. (some col.) ; 26 cm. + 1 CD-ROM (4 3/4 in.)

Includes bibliographical references and index.

Contents: Ch.1. Introduction Ch.2. The SEM and its Modes of operation -- Ch.3. Electron Beam-specimen interactions -- Ch.4. Image formation and interpretation -- Ch.5. Special topics in scanning electron microscopy -- Ch.6. Generation of X-Ray in the SEM specimen -- Ch.7. X-Ray spectral measurement: EDS and WDS -- Ch.8. Qualitative X-Ray analysis -- Ch.9. Quantitative X-Ray analysis: The basics -- Ch.10.Special topics in electron beam X-Ray microanalysis -- Ch.11. Specimen preparation of hard materials: Metals, ceramics, rocks, minerals, microelectronic and packaged devices, particles, and fibers -- Ch.12. Specimen preparation of polymer materials -- Ch.13. Ambient-temperature specimen preparation of biological material -- Ch.14. Low-temperature specimen preparation -- Ch.15. Procedures for elimination of charging in nonconducting specimens

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Scanning electron microscopy.
X-ray microanalysis.

502.825 / SCA