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Fundamentals of semiconductor fabrication / by Gary S. May and Simon M. Sze
Material type:
TextPublication details: New Delhi Wiley India 2011Description: xiii, 305 p. : ill. ; 26 cmISBN: - 9788126532605
- 621.38152 MAY
Contents:
Contents: Ch.1. Introduction -- Ch.2. Crystal growth -- Ch.3. Silicon oxidation -- Ch.4. Photolithography -- Ch.5. Etching -- Ch.6. Diffusion -- Ch.7. Ion Implantation -- Ch.8. Film deposition -- Ch.9. Process integration -- Ch.10 IC manufacturing -- Ch.11. Future trends and challenges
| Item type | Current library | Collection | Call number | Status | Date due | Barcode | Item holds |
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Books
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Learning Resource Centre | 621.38152 MAY (Browse shelf(Opens below)) | Available | 3076 | |||
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Books
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Learning Resource Centre | 621.38152 MAY (Browse shelf(Opens below)) | Available | 3077 | |||
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Books
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Learning Resource Centre | Reserve Books | 621.38152 MAY (Browse shelf(Opens below)) | Not for loan | 3078 |
Total holds: 0
Includes bibliographical references and index.
Contents: Ch.1. Introduction -- Ch.2. Crystal growth -- Ch.3. Silicon oxidation -- Ch.4. Photolithography -- Ch.5. Etching -- Ch.6. Diffusion -- Ch.7. Ion Implantation -- Ch.8. Film deposition -- Ch.9. Process integration -- Ch.10 IC manufacturing -- Ch.11. Future trends and challenges
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